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铁道科学与工程学报

JOURNAL OF RAILWAY SCIENCE AND ENGINEERING

Vol. 19    Special 2    September 2009

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Surface finish ­­of micro punch with ion beam irradiation
XU Jie(徐 杰)1, 2 , WANG Chun-ju(王春举)1, 2, GUO Bin(郭 斌)1, 2,
SHAN De-bin(单德彬)1, 2, Y. SUGIYAMA3, S. ONO3

1. School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China;
2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education,
Harbin Institute of Technology, Harbin 150080, China;
3. Elionix Inc., Tokyo 192-0063, Japan

Abstract:Ion beam irradiation was adopted for surface treatment of the micro punch manufactured by precision machining. Ar plasma was used for the ion irradiation process, which was generated by the electron cyclotron resonance(ECR) equipment. The surface finish processes of micro punch were carried out at irradiation angles of 45˚ and 10˚, respectively. The surface roughness and topography were measured to estimate the quality of surface finish. The results show that the ion irradiation is very effective to reduce the surface roughness, which can be improved more significantly at irradiation angle of 10˚ than at 45˚. The technology of surface finish with ion beam irradiation is suitable for the surface treatment of micro die.

 

Key words: surface finish; ion beam; micro punch; surface roughness

ISSN 1672-7029
CN 43-1423/U

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