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铁道科学与工程学报

JOURNAL OF RAILWAY SCIENCE AND ENGINEERING

Vol. 8    No. 2    June 1998

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INFLUENCE OF CRYSTALLIZATION TEMPERATURE ON PHASE TRANSFORMATION IN Ti-RICH NiTi THIN FILMS
Qi Xuan1, Guo Liang1, Jiang Bohong1, Xu Dong2, Qi Zhenzhong2 and Cai Bingchu2

1.Department of Materials Science,
2.Information Storage Research Centre,ShanghaiJiao Tong University, Shanghai200030, P. R. China

Abstract:The effects of crystallization annealing temperature on phase transformation temperature and SME of Ti-rich NiTi thin films prepared by the magnetron-sputtering system were studied. The experimental results showed that the phase transformation sequence of Ti-rich NiTi thin films were PRM for cooling transformation, and RP and MP for heating one, while increasing the annealing temperature from 823K to 1 103 K, theR-phase transformation temperature TP-R and TR-P were nearly unchanged, the martensitic transformation temperatures, however, moved to higher temperature. A thin film with room temperature micro-structure consisting of almost wholeR-phase can be obtained by annealing at appropriate temperature (e.g. at 923 K), which possesses a stable transformation temperature, narrow hysteresis and a good SME. It is suitable for the application to the micro-machine elements.

 

Key words: NiTi alloy film crystallization phase transformation

ISSN 1672-7029
CN 43-1423/U

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